DUV supercontinuum sources

ultralumina's ultra-high brightness, broadband light sources exploit non-linear optical effects in a gas-filled Hollow-core Photonic Chrystal Fibre to generate supercontinuum radiation from the IR to the deep-UV (180 to 1800nm) with excellent beam quality*.

By changing the type of working gas and gas pressure, the spectral properties of the output can be tuned and different modes of operation can be realized:

  • At pulse energies of  about 10 µJ and higher pressures (some 10s of bar), the pump pulse is converted to a broadband continuum ranging to about 240 nm. The resulting spectral range in the UV is similar to state-of-the-art laser-driven plasma or arc-discharge lamps, but the spectral radiance is more than five orders of magnitude higher, a consequence of the "laser-like" beam properties.
  • At higher pulse energies (> 10 µJ) and lower pressures (0-25 bar), a pronounced UV radiation band is synthesized and the central wavelength can be tuned by changing the gas type and pressure from the visible to about 190 nm. Conversion efficiencies from the pump to the UV wave can reach 10 %.

Applications that can benefit from such source include optical metrology in semiconductors (e.g. scatterometry and ellipsometry), time-resolved fluorescence detection (TCSPC) or DUV microscopy.

The system consists of a solid-state fibre optical pump laser as well as a converter unit containing the PCF fibre, gas cell, optics and control systems. Auto-alignment facilitates the launch optimisation process and ensures that the pump laser remains aligned with the hollow-core PCF.

Alternatively, the converter can be supplied on its own, for customers who already possess a suitable pump laser (sub-ps / 10 µJ, 1 µm fibre laser, or 10s of fs Ti:Sapph laser).

Specifications:

  • Average output power: > 2 W (depending on repetition rate)
  • Spectral coverage:
    o   240 - 1800 nm (broadband continuum)
    o   Tuneable narrow band SC: 190 - 360 nm center, 10nm width
  • Spectral power density: > 1 mW/nm (depending on repetition rate)
  • Conversion efficiency from NIR pump into the DUV: ca. 5-10%
  • Beam quality: near Gaussian, M² < 1.3
  • Tunable DUV-VIS converter: 
    Specifications for a pump system with 1030 nm central wavelength, 300 fs pulse duration, 10-20 µJ pulse energy, M² < 1.3 TEM_00 beam quality and several 100 kHz repetition rate. Please contact us for performance parameters achievable when using a different pump source (e.g. a Ti:Sapph amplifier)

*the generation of UV to 110 nm has been demonstrated

 

Photograph of ultralumina's DUV light source

Photograph of ultralumina's DUV light source

 
 

Typical Spectral radiance vs frequency (wavelength) of different light sources. ultralumina's converter has a radiance about 5 orders of magnitude larger than state-of-the-art plasma lamps.

Typical Spectral radiance vs frequency (wavelength) of different light sources. ultralumina's converter has a radiance about 5 orders of magnitude larger than state-of-the-art plasma lamps.

 
 

Central emission wavelength can be tuned by changing gas type and pressure

Central emission wavelength can be tuned by changing gas type and pressure